Stable emission gas ion source and method of operation thereof,申请号EP20080154576-传众专利搜索

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发明名称	Stable emission gas ion source and method of operation thereof
摘要
申请公布号	EP2110843(B1)	申请公布日期	2011.08.24
申请号	EP20080154576	申请日期	2008.04.15
申请人	ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH	发明人	WINKLER, DIETER;WEIGEL, UDO;GRIMM, STEFAN
分类号	G01Q30/16;H01J37/08;H01J27/26	主分类号	G01Q30/16
代理机构		代理人
主权项
地址

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