CONDUCTIVE PILLAR STRUCTURE FOR SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURE

摘要

PURPOSE: A conductive filter structure for a semiconductor substrate and a manufacturing method thereof are provided to improve the uniformity on the rear of a substrate by uniformly distributing pressure to the rear of the substrate using a dummy pillar. CONSTITUTION: A semiconductor substrate(100) comprises a first surface(103) and a second surface. A penetration silicon via(113) is extended from the first surface to the second surface of the semiconductor substrate. A protective layer(119) is formed on the first surface of the semiconductor substrate. A plurality of active conductive pillars has a first height. A plurality of dummy conductive pillars has a second height.