COMPOUNDS HAVING PHENOL SUBSTITUENTS, PROCESS FOR PRODUCTION OF THE SAME AND RESIST COMPOSITION COMPRISING THE SAME

摘要

PURPOSE: A compound having phenol substituents is provided to ensure high heat resistance and amorphous property, to secure a sublimation property and film formation property. CONSTITUTION: A compound having phenol substituents is represented by chemical formula 1. In chemical formula 1, R2 and R3 are one selected from the group consisting of hydrogen, halogen, carboxy, nitrile, aldehyde, epoxy, alkyl, cycloalkyl, heterocycloalkyl, aryl, aralkyl, heteroaryl and heteroaralkyl; R5-R7 are one selected from the group consisting of hydrogen, halogen, carboxy, hydroxy, nitrile, aldehyde, epoxy, alkyl, cycloalkyl, heterocycloalkyl, aryl, aralkyl, heteroaryl and heteroaralkyl; n1 is the integer of 1-30; and R1 and R4 are an acid-labile functional group.