| 摘要 |
<p>An imprint apparatus includes a dispenser (7), a detector (5) configured to detect an alignment mark (103) located on a pattern surface of a template, and a controller (C). The pattern surface includes a first region (102) including a pattern corresponding to the resin pattern, and a second region (101) including the alignment mark, and is formed such that a second time when a recess in the second region is filled with the uncured resin is later than a first time when a recess in the first region is filled with the uncured resin. The controller causes the dispenser to dispense, on the substrate, the uncured resin that has an amount such that the recesses in the first and second regions are filled with the uncured resin and causes the detector to detect the alignment mark between the first time and the second time.</p> |
