FUNCTIONALLY GRADED TRANSPARENT CONDUCTING OXIDE FILM AND METHOD FOR MANUFACTURING THEREOF, ANODE FOR ORGANIC LIGHT EMITTING DIODE AND WINDOW LAYER FOR SOLAR CELL USING FUNCTIONALLY GRADED TRANSPARENT CONDUCTING OXIDE FILM

摘要

PURPOSE: A functionally graded transparent conducting oxide film and method for manufacturing thereof, anode for organic light emitting diode and window layer for solar cell using functionally graded transparent conducting oxide film are provided to improve optical characteristic by using a sputtering-evaporating method. CONSTITUTION: A functionally graded transparent conducting oxide film comprises ZnO thin film(200) and a tilted thin film(300). The ZnO thin film adheres to a transparent substrate(100). The tilted thin film is formed by evaporating ZnO and Ga2O3 to the ZnO thin film and the tilted thin film. The Ga2O3 of the tilted thin film has the concentration gradient in a thickness direction.