| 摘要 |
PURPOSE: A substrate table, a lithographic device, and a method for manufacturing a device using the lithographic device are provided to prevent a droplet from passing through an encoder plate by using an emitter for projecting a beam to the encoder plate along a sensor beam path. CONSTITUTION: An encoder plate(100) is located on a substrate table. An air knife opening unit(310) is located in an outer gap(300) and prevents droplet from reaching the encoder plate. A fluid extraction system(330) has one or more openings on the surface of a gap to extract liquid from the gap. |
