发明名称
摘要 <p>PROBLEM TO BE SOLVED: To provide a device and a method for suction-holding a glass plate, preventing the glass plate from getting dry by constantly supplying glass plate with water. SOLUTION: This device for suction-holding the glass plate is provided with a holding surface table 14 with a liquid supply hole 20 and a plurality of suction holes 18 in a placing face 16 for placing the glass plate 12; a liquid supply means 42 communicating with the liquid supply hole 20 to allow water to flow out to the placing face 16; and an exhaust means 40 communicating with the suction holes 18.</p>
申请公布号 JP4756295(B2) 申请公布日期 2011.08.24
申请号 JP20000341879 申请日期 2000.11.09
申请人 发明人
分类号 B23Q3/08;B24B9/10;B24B41/06;B65G49/06;H01L21/677;H01L21/68 主分类号 B23Q3/08
代理机构 代理人
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