发明名称 Irradiance pulse heat-treating methods and apparatus
摘要 A method of heat-treating a workpiece includes generating an initial heating portion and a subsequent sustaining portion of an irradiance pulse incident on a target surface area of the workpiece. A combined duration of the initial heating portion and the subsequent sustaining portion is less than a thermal conduction time of the workpiece. The initial heating portion heats the target surface area to a desired temperature and the subsequent sustaining portion maintains the target surface area within a desired range from the desired temperature. Another method includes generating such an initial heating portion and subsequent sustaining portion of an irradiance pulse, monitoring at least one parameter indicative of a presently completed amount of a desired thermal process during the irradiance pulse, and modifying the irradiance pulse in response to deviation of the at least one parameter from an expected value.
申请公布号 US8005351(B2) 申请公布日期 2011.08.23
申请号 US20080053102 申请日期 2008.03.21
申请人 MATTSON TECHNOLOGY CANADA, INC. 发明人 CAMM DAVID MALCOLM;MCCOY STEVE;STUART GREG
分类号 A21B2/00;A21B1/00;C23C16/00 主分类号 A21B2/00
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