发明名称 |
Irradiance pulse heat-treating methods and apparatus |
摘要 |
A method of heat-treating a workpiece includes generating an initial heating portion and a subsequent sustaining portion of an irradiance pulse incident on a target surface area of the workpiece. A combined duration of the initial heating portion and the subsequent sustaining portion is less than a thermal conduction time of the workpiece. The initial heating portion heats the target surface area to a desired temperature and the subsequent sustaining portion maintains the target surface area within a desired range from the desired temperature. Another method includes generating such an initial heating portion and subsequent sustaining portion of an irradiance pulse, monitoring at least one parameter indicative of a presently completed amount of a desired thermal process during the irradiance pulse, and modifying the irradiance pulse in response to deviation of the at least one parameter from an expected value.
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申请公布号 |
US8005351(B2) |
申请公布日期 |
2011.08.23 |
申请号 |
US20080053102 |
申请日期 |
2008.03.21 |
申请人 |
MATTSON TECHNOLOGY CANADA, INC. |
发明人 |
CAMM DAVID MALCOLM;MCCOY STEVE;STUART GREG |
分类号 |
A21B2/00;A21B1/00;C23C16/00 |
主分类号 |
A21B2/00 |
代理机构 |
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代理人 |
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