发明名称 Semiconductor device fabricating method and fabricating apparatus
摘要 Respective attracting openings of a bonding head are disposed so as to avoid joining regions at which bump electrodes (obverse electrodes) of a semiconductor chip are joined with bump electrodes of a package substrate. Bump electrodes (reverse electrodes) that are connected to the bump electrodes are provided at a reverse side of the semiconductor chip at positions opposing the bump electrodes. Because the attracting openings do not overlap the joining regions, the bump electrodes (reverse electrodes) are not suctioned at the joining regions.
申请公布号 US8003437(B2) 申请公布日期 2011.08.23
申请号 US20080314117 申请日期 2008.12.04
申请人 OKI SEMICONDUCTOR CO., LTD. 发明人 SAEKI YOSHIHIRO
分类号 H01L21/00 主分类号 H01L21/00
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