发明名称 Method for manufacturing a poly-crystal silicon photovoltaic device using horizontal metal induced crystallization
摘要 A method for manufacturing a poly-crystal silicon photovoltaic device using horizontal metal induced crystallization comprises the steps of forming at least one layer of an amorphous silicon thin film on a substrate, forming at least one groove of which depth is less than or equal to that of the thin film on the amorphous silicon thin film, and horizontally crystallizing the amorphous silicon thin film by forming a metal layer on an upper portion of the groove. Since a crystal shape and a growth direction of the photovoltaic device can be adjusted by the method, a poly-crystal silicon thin film for improving current flow can be formed at a low-temperature.
申请公布号 US8003423(B2) 申请公布日期 2011.08.23
申请号 US20080520673 申请日期 2008.01.09
申请人 LG ELECTRONICS INC. 发明人 YUN JUNG-HEUM;LEE KWY-RO;LEE DON-HEE;LEE HEON-MIN
分类号 H01L21/00 主分类号 H01L21/00
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