| 摘要 |
PURPOSE: A substrate processing device and a rod locking device are provided to lighten the weight of the rod locking device by sealing each buffer member while maintaining a hollow space therein. CONSTITUTION: In a substrate processing device and a rod locking device, a substrate accommodation unit changes internal pressure to a decompression condition and an atmospheric pressure. A buffer mounting unit is installed in the substrate accommodation unit and mounts a received substrate temporarily. The buffer mounting unit is comprised of one or plural buffer members(222). The buffer member includes plates(232,234) sealing the open end of a hollow pipe member and a pipe member. A sealing plug(240) is installed in the through hole(242) which is formed on the plate.
|
