| 摘要 |
FIELD: process engineering. ^ SUBSTANCE: invention relates to plasma processing of surface inside hollow body. Proposed method comprises several stages. First, hollow body 4 is filled with process gas. Hollow body has one wall made from dielectric material. Gas permeability is ensured by sealing hollow body 4. Then, hollow body is fed into gap 5 between at least two electrodes 1, 2. Gas permeability is ensured by sealing hollow body. External pressure of at least 0.05 MPa (0.5 bar) prevails in space 5, outside said hollow body. External pressure of at least 0.05 MPa (0.5 bar) prevails in internal chamber of hollow body. Gap 5 between electrodes 1, 2 is filled with gas. Gas requires higher field intensity for ignition in the case of external pressure compared with process gas in the case of internal pressure. External pressure does not exceed internal pressure. Plasma if fired inside hollow body on applying sufficiently high AC voltage in between electrodes a and 2. ^ EFFECT: simplified method. ^ 22 cl, 5 dwg |
