TREATMENT LIQUID EJECTION INSPECTING METHOD, TREATMENT LIQUID EJECTION INSPECTING APPARATUS AND COMPUTER READABLE RECORDING MEDIUM

摘要

A luminance inspecting region for inspecting luminance and an image profile inspecting region for inspecting an image profile are set between a nozzle and a substrate. Based on the luminance of an image picked up from the luminance inspecting region, ejection of a treatment liquid is inspected. The profile of an image in the image profile inspecting region is compared with a previously stored treatment liquid ejection image, and ejection of the treatment liquid is inspected. The ejection time of the treatment liquid is calculated based on combination of the inspection results obtained from the luminance inspecting region and that from the image profile inspecting region.