| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of readily measuring an amount of ions. SOLUTION: An ion monitor 1 includes a main body 10, and a first portion 11 and a second portion 12 extending from the main body 10. The first portion 11 contains a first wall surface 21, and the second portion 12 contains a second wall surface 22. The first wall surface 21 and the second wall surface 22 are arranged facing each other across a space opened to atmosphere 5, consist of a conductive resin or a conductive ceramic, and are insulated from the main body 10. The ion monitor 1 further includes an ammeter 31 indicating the amount of ions captured by the first wall surface 21 and an ammeter 32 indicating the amount of ions captured by the second wall surface 22. COPYRIGHT: (C)2011,JPO&INPIT |
