发明名称 PATTERNING
摘要 The present invention provides a method of patterning an electronic or photonic material on a substrate comprising: forming a film (polymer A) of said electronic or photonic material on said substrate; and using a fluoropolymer (e.g.cytop) to protect regions of said electronic or photonic material during a patterning process.
申请公布号 WO2011004198(A3) 申请公布日期 2011.08.18
申请号 WO2010GB51130 申请日期 2010.07.09
申请人 CAMBRIDGE ENTERPRISE LIMITED;SIRRINGHAUS, HENNING;CHANG, JUI-FEN;GWINNER, MICHAEL 发明人 SIRRINGHAUS, HENNING;CHANG, JUI-FEN;GWINNER, MICHAEL
分类号 H01L51/00;G03F7/11;H01L51/05 主分类号 H01L51/00
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