Device for electron beam evaporation, comprises a crucible, by which a strip-shaped substrate to be coated is guided into a continuously operating vacuum coating system in a longitudinal direction, and a movable panel arrangement

摘要

The device comprises a crucible (3), by which a strip-shaped substrate (1) to be coated is guided into a continuously operating vacuum coating system in a longitudinal direction (2), where a material is present as target (4) in the crucible and a layer is applied on a side of the substrate turned towards the crucible by using the material, and a movable panel arrangement, which is arranged between the crucible and the side of the substrate to be coated and changes the size of a coating zone exposed to the vapor synchronously to a change of the vapor cloud. The device comprises a crucible (3), by which a strip-shaped substrate (1) to be coated is guided into a continuously operating vacuum coating system in a longitudinal direction (2), where a material is present as target (4) in the crucible and a layer is applied on a side of the substrate turned towards the crucible by using the material, and a movable panel arrangement, which is arranged between the crucible and the side of the substrate to be coated and changes the size of a coating zone exposed to the vapor synchronously to a change of the vapor cloud. The crucible is moved back and forth transverse to the longitudinal direction. An arrangement of shape-variably adjustable shielding panel is provided between the substrate and the target or the crucible. The shielding panel consists of a parallel flat material lying to the substrate. The arrangement of shielding panel consists of a first shielding panel group lying on the substrate behind the coating zone in the longitudinal direction and a second shielding panel group lying above the coating zone in the longitudinal direction. Each of the shielding panel groups is provided with two movable panel parts, which are controllably formed, so that they cause a change of the coating of the substrate caused due to the movement of the crucible by the inclination of the vapor cloud and opposing the adjustment of the coating zone. The control of the moving panel parts is synchronized with the movement of the crucible. The shielding panel groups have immovable panel parts, which are arranged in an area over the center of the substrate. The movable panel parts are rotatably hinged to the immovable panel parts. The movable panel parts are formed as circular-segment-shaped disks, which are pivotable around an axis lying vertical to the substrate. The movable panel parts are connected with the mechanical drives for the pivotation.