LASER MACHINING APPARATUS

摘要

PURPOSE: A laser processing device is provided to prevent damage to device layer by dispersing the pulsed laser beam through the surface in which the device is formed. CONSTITUTION: A laser processing device comprises a chuck table(36), a laser beam jetting member and a manufacturing feeding member. The chuck table maintains workpiece. The laser beam jetting member projects pulse laser beam having transparency to the workpiece fixed on the chuck table. The manufacturing feeding member relatively processes the chuck table and the laser beam jetting member.