| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To significantly improve convenience of data processing by storing all of image data in a primary storage device, namely, a memory that allows direct access to any part of the image data, in a device that collects a large amount of image data in a defect inspection device or the like for semiconductor photomasks and allows a computer to detect defects on photomasks on the basis of the image data. <P>SOLUTION: A plurality of sockets 2 are mounted on a memory board 1. Removable nonvolatile memory cards such as SD cards are attached to the sockets. A memory system is constructed so that a total capacity of the mounted memories shows the entire capacity by controlling it by a control circuit 4 provided in a center part of the memory board. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
