| 摘要 |
PROBLEM TO BE SOLVED: To provide a butterfly type pressure control valve, which allows performing maintenance on a valve element portion or the like without disassembling the body of a valve by preventing adhesion of a product material inside the valve by heating of a heater. SOLUTION: The butterfly type pressure control valve to be connected between a vacuum chamber and a vacuum pump includes a body 81 having a flow passage and a valve element 83 capable of opening and closing the flow passage by a valve shaft 89. The valve element 83 is detachably attached to the valve shaft 89, and a heater is mounted on the valve shaft 89. The heater is heated by carrying current from the outside through a wire 92 connected to the heater, and the resulting heat is conducted from the valve shaft 89 to the valve element 83. COPYRIGHT: (C)2011,JPO&INPIT |
