| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning system in which the abrupt change in density of a cleaning fluid in a cleaning chamber can be prevented and an object to be cleaned does not suffer damage after cleaning. SOLUTION: In the cleaning system 10, the cleaning fluid is passed through from a first face to a second face of a filter stored in the cleaning chamber of a cleaning container 15 to clean the filter; and after the filter is cleaned, a control device 18 executes a first temperature control means, second temperature control means and inflow control means to keep the temperature of the cleaning fluid in the cleaning chamber roughly constant, and executes a fluid pressure decreasing means via a mass flow controller 16 to reduce the density of the cleaning fluid in the cleaning chamber at a roughly constant descent gradient. COPYRIGHT: (C)2011,JPO&INPIT
|
