SAMPLE FOR IMAGE RESOLUTION EVALUATION, CHARGED PARTICLE BEAM DEVICE, AND SAMPLE PREPARATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a more ideal standard sample for resolution evaluation of a charged particle beam device. SOLUTION: A sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of a substrate, a step of dripping on the substrate colloid metal or metal fine particles dispersed in an ionic liquid, and a step of removing the solution dripped on the substrate. Also, the sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of the substrate and a step of attaching metal fine particles on the surface of the substrate by sputtering. COPYRIGHT: (C)2011,JPO&INPIT