ELECTRON MICROSCOPE AND SAMPLE ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To enable to easily obtain crystal orientation information of a sample interior. SOLUTION: An electron microscope has: an electron beam lens-barrel 1 in order to irradiate an electron beam 1a to a sample 11; a sample stage 3 to support the sample 11; a scattered electron detector 6 in order to detect backscattered electrons discharged from the sample 11; and a focused ion beam lens-barrel 2 in order to irradiate the sample 11 with a focused ion beam 2b. COPYRIGHT: (C)2011,JPO&INPIT