发明名称 OPTICAL INSPECTION SYSTEM USING MULTI-FACET IMAGING
摘要 An optical inspection system, the system includes: (i) an image sensor; and (ii) a single optical element, that at least partially surrounds an edge of an inspected object; wherein the optical element is adapted to direct light from different areas of the edge of the inspected object towards the image sensor so that the image sensor concurrently obtains images of the different areas.
申请公布号 US2011199480(A1) 申请公布日期 2011.08.18
申请号 US20100828368 申请日期 2010.07.01
申请人 CAMTEK LTD. 发明人 LEV MICHAEL;GILEAD AMIR
分类号 H04N7/18 主分类号 H04N7/18
代理机构 代理人
主权项
地址