发明名称 CONTROLLING RELATIVE GROWTH RATES OF DIFFERENT EXPOSED CRYSTALLOGRAPHIC FACETS OF A GROUP-III NITRIDE CRYSTAL DURING THE AMMONOTHERMAL GROWTH OF A GROUP-III NITRIDE CRYSTAL
摘要 <p>A method for controlling the relative and absolute growth rates of all possible crystallographic planes of a group-III nitride crystal during ammonothermal growth. The growth rates of the various exposed crystallographic planes of the group-III nitride crystal are controlled by modifying the environment and/or conditions within the reactor vessel, which may be subdivided into a plurality of separate zones, wherein each of the zones has their own environment and conditions. The environment includes the amount of atoms, compounds and/or chemical complexes within each of the zones, along with their relative ratios and the relative motion of the atoms, compounds and/or chemical complexes within each of the zones and among the zones. The conditions include the thermodynamic properties each of the zones possess, such as temperatures, pressures and/or densities.</p>
申请公布号 KR20110093857(A) 申请公布日期 2011.08.18
申请号 KR20117012937 申请日期 2009.11.04
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 PIMPUTKAR SIDDHA;KAMBER DERRICK S.;SPECK JAMES S.;NAKAMURA SHUJI
分类号 C30B21/06;C30B7/00;C30B29/38;H01L21/20 主分类号 C30B21/06
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