摘要 |
A black matrix formed on a substrate includes four layers formed by stacking a first film, a second film, a third film, and a fourth film in this order, each film being made of a transition metal oxide and a silicon oxide. A relationship of refractive index of the first film=refractive index of the third film<refractive index of the second film=refractive index of the fourth film is set, the fourth film is a multilayer film, with each layer being identical in composition to each other, and a boundary is recognized within the fourth film when seen on a TEM picture.
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