发明名称 SHUTTER DEVICE AND VACUUM PROCESSING APPARATUS
摘要 A shutter device having two shutter plates, which shield between an IBS and a substrate, is configured such that the two shutter plates are disposed at symmetrical positions across the IBS and can perform an opening/closing operation in synchronization with a rotation of a rotation-link-member which is rotatably disposed surrounding the IBS. With the configuration, the shutter device can reduce an offset of a shield range in the opening/closing operation.
申请公布号 US2011198033(A1) 申请公布日期 2011.08.18
申请号 US201113027974 申请日期 2011.02.15
申请人 CANON ANELVA CORPORATION 发明人 TSUJIYAMA MASASHI
分类号 C23F1/02;B05C11/00;C23C14/34 主分类号 C23F1/02
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