发明名称 HYPERBRANCHED POLYMER SYNTHESIZING METHOD, HYPERBRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND SEMICONDUCTOR INTEGRATED CIRCUIT FABRICATION METHOD
摘要 A method of synthesizing a hyperbranched polymer by living radical polymerization of a monomer in the presence of a metal catalyst includes at least adding a compound or setting the amount of the monomer in the living radical polymerization. The compound added is at least a compound represented by R1-A or a compound represented by R2—B—R3, where R1 denotes hydrogen, an alkyl group (1-10 carbons), aryl group (1-10 carbons), or aralkyl group (7-10 carbons), A denotes a cyano group, hydroxyl group, or nitro group, R2 and R3 denote hydrogen, alkyl groups (1-10 carbons), aryl groups (6-10 carbons), aralkyl groups (7-10 carbons), or dialkylamino groups (2-10 carbons), and B denotes a carbonyl group or sulfonyl group. Setting of the monomer amount includes setting the amount of monomer to be mixed into a reaction system at one mixing to be less than the total monomer to be mixed with the reaction system.
申请公布号 US2011198730(A1) 申请公布日期 2011.08.18
申请号 US20070521384 申请日期 2007.12.20
申请人 LION CORPORATION 发明人 TANAKA YUKO;UNO AKINORI;KABASHIMA SHINICHIRO;TAMURA MINORU;KUBO YOSHIYASU;SASAKI YUSUKE;HORIBE MINEKO;KANEKO YUKIHIRO;SUZUKI KAORU
分类号 H01L29/02;C08F12/18;C08F257/02;H01L21/302 主分类号 H01L29/02
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