发明名称 |
NANOSTRUCTURES AND METHOD OF MAKING THE SAME |
摘要 |
A method for fabricating nano-structures comprising providing a substrate for the growth of the nano-structures; providing a template having predetermined nano-patterns; providing at least one layer of mask material between the template and the substrate; transferring the nano-patterns from the template to the layer of mask material; and growing the nano-structures on the substrate in areas exposed through the nano-patterns in the layer of mask material by a bottom-up growth process. |
申请公布号 |
KR20110093906(A) |
申请公布日期 |
2011.08.18 |
申请号 |
KR20117014400 |
申请日期 |
2004.08.31 |
申请人 |
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH;NATIONAL UNIVERSITY OF SINGAPORE |
发明人 |
CHUA SOO JIN;CHEN PENG;WANG YADONG |
分类号 |
B82B1/00;B82B3/00;B82Y15/00 |
主分类号 |
B82B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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