| 摘要 |
PURPOSE: A substrate fixing module, a substrate inspecting device with the same, and a substrate fixing method using the same are provided to minimize an area onto which an inspection substrate is fixed, thereby expanding an inspection area. CONSTITUTION: A substrate transferring module(100) transfers an inspection substrate(10) to substrate fixing modules(200). The substrate transferring module includes a conveyor belt and a plurality of rotation rollers. The rotation rollers transfer an inspection substrate, which is arranged on the conveyor belt, by a rotation force. A plurality of clamp areas(12) fixes the inspection substrate. The substrate fixing module includes substrate fixing blocks(210), a block support body(220), and block coupling units(230).
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