| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a solid-state imaging apparatus in which the distance from a light receiving surface to below an in-layer lens is shortened to enhance light condensing efficiency without lowering sensitivity. SOLUTION: A method of manufacturing the solid-state imaging apparatus having an effective pixel region and an optical black region for generating a reference signal, those regions being arranged on one principal surface of a substrate, includes: a first process of forming a first metal layer on the one principal surface of the substrate; a second process of forming a first insulating film on the first metal layer; a third process of forming a second metal layer for shielding the optical black region from light after the second process; a fourth process of forming a passivation layer and inner lens forming film without forming a flattening film after the third process; and a fifth process of processing the passivation layer and inner lens forming film to form the in-layer lens at least in the effective pixel region and forming a passivation film using the remaining film of the passivation layer and inner lens forming film after the formation of the in-layer lens. COPYRIGHT: (C)2011,JPO&INPIT
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