| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing trichlorosilane, which heats a supplied gas at a high thermal efficiency, which can be upsized without damaging the thermal efficiency, and which can carry out mass production. SOLUTION: The apparatus for manufacturing trichlorosilane includes a reaction vessel 20 having a reaction chamber 11 in which a raw material gas containing tetrachlorosilane and hydrogen is supplied to produce a reaction gas containing trichlorosilane and hydrogen chloride, a heater 30 equipped in the reaction chamber 11 and heating the raw material gas, a heat insulating vessel 40 installed so as to surround the periphery of the reaction vessel 20, and a gas supply flow passage 15 installed between the heat insulating vessel 40 and the reaction vessel 20 so as to surround the reaction vessel 20 and supplying the raw material gas to the reaction chamber 11. COPYRIGHT: (C)2011,JPO&INPIT
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