发明名称 TEMPORARY WAFER BONDING METHOD FOR SEMICONDUCTOR PROCESSING
摘要 <p>A method for temporary wafer bonding employs a curable adhesive composition and a degradation agent combined with the curable adhesive composition. The adhesive composition may include (A) a polyorganosiloxane containing an average of at least two silicon-bonded unsaturated organic groups per molecule, (B) an organosilicon compound containing an average of at least two silicon-bonded hydrogen atoms per molecule in an amount sufficient to cure the composition, (C) a catalytic amount of a hydrosilylation catalyst, and (D) a base. The film prepared by curing the composition is degradable and removable by heating.</p>
申请公布号 WO2011100030(A1) 申请公布日期 2011.08.18
申请号 WO2010US60416 申请日期 2010.12.15
申请人 DOW CORNING CORPORATION;HARKNESS, BRIAN 发明人 HARKNESS, BRIAN
分类号 C09J5/06 主分类号 C09J5/06
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