| 摘要 |
PROBLEM TO BE SOLVED: To minimize the quantity of particles coming from the outside to an open surface of a wafer carrier, and to prevent the curling of particles. SOLUTION: A load port is provided for mounting a wafer carrier that seals and accommodates a plurality of wafers, and includes an FIMS door that opens the carrier door of the wafer carrier. In the load port, a clean gate that covers the open surface of the wafer carrier opened by the FIMS door is arranged. COPYRIGHT: (C)2011,JPO&INPIT
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