| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for generating spark discharge at a portion irradiated with laser and analyzing a component in a micro region of a metal sample, without adjusting, in a particular state, a distance between the sample and a counter electrode. SOLUTION: In the emission spectral analysis method, spark discharge is generated between a metal sample and a counter electrode, an emission spectrum formed by the spark discharge generated is dispersed, and a component of the metal sample is analyzed. In the emission spectral analysis method, pulse laser with power density of 10<SP>9</SP>W/cm<SP>2</SP>or more at the metal sample surface is emitted to the metal sample surface having a radius within 3.0 mm around the end of a line perpendicular to the metal sample, drawn from the tip of the counter electrode, the spark discharge is generated between the laser irradiation portion of the metal sample and the counter electrode within 200μs after the pulse laser irradiation. COPYRIGHT: (C)2011,JPO&INPIT
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