| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a cantilever for manufacturing a cantilever including a finer and highly durable probe. SOLUTION: The cantilever comprises a planar beam unit, a support unit for supporting one edge of the beam unit, and a probe disposed at an edge at a side opposite to a side supported by the support unit of the beam unit, and is used for a scanning type probe microscope. The method of manufacturing the cantilever includes a bulk cutting process of cutting a bulk from a sample, a bonding process of bonding the bulk to the beam unit, and a needle unit working process of creating a needle unit of the probe by irradiating the bulk with convergent ion beams, thus solving the above problem. COPYRIGHT: (C)2011,JPO&INPIT
|
