| 摘要 |
An overall leakage rate of a vacuum system which can be operated continuously or cyclically is determined. The vacuum system includes at least one process chamber (10) and a pumping device (16) connected to the process chamber (10). In a cyclical leakage rate determination technique, the following steps are taken: suppressing a process gas feed to the process chamber (10), feeding a carrier gas to the process chamber (10), conveying the carrier gas and a leakage gas using the pumping device (16), measuring an amount of a gas component in the pumped gas, and determining the overall leakage rate of the vacuum system based on the measured amount of the gas component.
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