| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device that realizes a high carriage speed by preventing vibration by stable and precise positioning control. SOLUTION: This carrying device 10 includes a device base 11 placed on a movement means; an electromagnet 12, formed by winding solenoid coils 12c around a core comprising a pair of columnar members 12a provided in parallel and a connection part 12b connecting one ends of the pair of columnar members 12a, and erected on the upper face 11a of the device base 11; and a carrying base 13, which includes a permanent magnet 15 disposed between the solenoid coils 12c, which is configured, such that the carrying base can be energized upward by the electromagnet 12, and on which a carried object is placed. By controlling the current supplied to the electromagnet 12 by a position control means 23, based on carrying base control displacement x measured by a carrying base control displacement measurement means 21 and device base displacement y measured by a device base displacement measurement means 22, the carrying device is able to control the position of the carrying base 13. COPYRIGHT: (C)2011,JPO&INPIT
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