METHOD FOR MANUFACTURING A SOLAR PANEL

摘要

A method for manufacturing a solar panel relies on a sequence of steps for manufacturing a silicon layer in a vacuum process chamber, said steps comprising: a) Providing a substrate covered at least partially with an electrode material such as ZnO, b) Introducing said substrate into a vacuum process chamber capable of generating a plasma therein, c) Depositing a first layer of silicon furnished with a first doping agent, d) Removing said substrate from said process chamber, e) Applying an oxidizing plasma to the plasma chamber, g) Reintroducing said substrate into said process chamber and Depositing further layers of silicon. Said first layer of silicon comprises preferably at least microcrystalline silicon.