发明名称 |
A SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD FOR MANUFACTURING A DEVICE USING A LITHOGRAPHIC APPARATUS. |
摘要 |
A table for a lithographic apparatus, the table having an encoder plate located on the table, a gap between the encoder plate and a top surface of the table, the gap located radially inward of the encoder plate relative to the periphery of the table, and a fluid extraction system with an opening in the surface of the gap to extract liquid from the gap. |
申请公布号 |
NL2006127(A) |
申请公布日期 |
2011.08.18 |
申请号 |
NL20112006127 |
申请日期 |
2011.02.03 |
申请人 |
ASML NETHERLANDS B.V., |
发明人 |
KANEKO, TAKESHI;OTTENS, JOOST;LAFARRE, RAYMOND |
分类号 |
G03F7/20;G03F9/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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