CONTROL APPARATUS FOR IMPROVING NON-LINEAR CHARACTERISTIC OF AN ELECTRIC CAPACITY DISPLACEMENT SENSOR

摘要

PURPOSE: A control device is provided to improve the non-linearity of a capacitive displacement sensor through periodic control of electric current applied to the electrode of the capacitive displacement sensor. CONSTITUTION: A control device(100) comprises an excitation signal generator(110), a voltage controlled current source(120), a phase signal generator(130), a switch unit(140), and a detection signal acquisition unit(150). The excitation signal generator creates an excitation signal for exciting the electrode of a capacitive displacement sensor. The voltage controlled current source is inputted with the excitation signal which is created by the excitation signal generator and outputs specified current being supplied to the electrode of the capacitive displacement sensor. The phase signal generator creates a phase signal that is 90 degrees ahead of the excitation signal.