| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid coating device which can reduce a treatment time of a plurality of substrates. SOLUTION: The liquid coating device 1 includes a liquid coating unit 3 for applying a liquid to a substrate 2, a guide member 6 for moving the liquid coating unit 3 along one moving shaft, a plurality of mounting tables 5A, 5B arranged in a row along the moving shaft, and a maintenance unit 4 arranged between the mounting tables 5A, 5B. While the liquid coating unit 3 moves between the mounting tables 5A, 5B, the liquid coating unit 3 performs liquid coating treatment, and the maintenance unit 4 performs the maintenance of the liquid coating unit 3, whereby a time for the treatment and the maintenance can be reduced. COPYRIGHT: (C)2011,JPO&INPIT |
