| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method capable of forming a tentative calcination film with foaming and cracks restrained, and efficiently manufacturing a high-Ic oxide superconducting thin film, even if a thickness of the tentative calcination film per layer is thick, in manufacturing the oxide superconducting thin film with the use of an FF-MOD method advantageous in cost. SOLUTION: In the method of manufacturing the oxide superconducting thin film with the use of the coating thermal decomposition method with metal organic compounds not containing fluorine as a raw material, when forming a tentative calcination film as a precursor of the oxide superconducting thin film , thermal treatment of thermally decomposing and removing organic ingredients contained in each metal organic compound by heating in the vicinity of temperature at which the organic ingredients contained in each metal organic compound starts to thermally decompose is gradually carried out from a low-temperature side, and thereafter, thermal treatment at high temperature is further carried out to decompose and remove remaining carbon. COPYRIGHT: (C)2011,JPO&INPIT |
