发明名称 THIN FILM TRANSISTOR AND METHOD FOR FABRICATING THIN FILM TRANSISTOR
摘要 Disclosed are a thin film transistor having high reliability and providing a simplified fabricating process, and a method of fabricating the thin film transistor. In the method, a dielectric substrate is prepared, a semiconductor layer is formed on the dielectric substrate, a gate dielectric film is formed on the semiconductor layer, a first gate electrode is formed on the gate dielectric film, a second gate electrode contacting a side wall of the first gate electrode is formed, and impurities are implanted into the semiconductor layer using the first gate electrode as a mask.
申请公布号 US2011198592(A1) 申请公布日期 2011.08.18
申请号 US20100794062 申请日期 2010.06.04
申请人 SNU R&DB FOUNDATION 发明人 KIM SUN JAE;HAN MIN KOO
分类号 H01L29/786;H01L21/86 主分类号 H01L29/786
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