| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic inspection method for calculating the quantity and/or a speed of a thickness reduction in an object to be measured, and its apparatus. SOLUTION: The ultrasonic inspection apparatus includes: an ultrasonic probe; a signal analyzer; and a thickness reduction calculator. The signal analyzer obtains a first data length (ΔN1) including a first signal of the N-th bottom reflection echo and a second data length (ΔN2) including a second signal of the (N+1)th bottom reflection echo from the N-th and (N+1)th bottom reflection echoes among multiple bottom reflection echoes, processes the first and second data lengths (ΔN), (ΔN) by a cross correlation operation, and finds a position of a peak value (Nk). The thickness reduction calculator measures a thickness of the object to be measured by using the peak value (Nk) and a sound speed (v) of the known object to be measured, measures the thickness of the object to be measured again with time, and calculates the quantity and/or the speed of the thickness reduction from a plurality of the thickness values with time. COPYRIGHT: (C)2011,JPO&INPIT |
