| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier device attaining short-time gas replacement in an FOUP (Front Opening Unified Pod) and removal of contaminants on a wafer and applicable to an existing device, to provide a carrier system with the substrate carrier device mounted, and to provide a replacement method in the substrate carrier device. SOLUTION: The substrate carrier device 10 includes a fork 11 to be placed with the substrate, an operation portion 12 supporting and moving the fork 11, and a body portion 19 supporting the operation portion 12. The substrate carrier device 10 further includes a gas injection nozzle 13 replacing air in a container containing the substrate with a predetermined gas. COPYRIGHT: (C)2011,JPO&INPIT |
