| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a contact hole, in which the contact hole can surely be formed by preventing a pillar from being buried in an insulating layer. SOLUTION: The method for forming the contact hole includes the steps of: forming the pillar M on a substrate 20; forming the insulating layer 25 for covering the pillar M; expanding the pillar M to crack the insulating layer 25 partially and expose a part of the pillar M to the outside of the insulating layer 25; and removing the pillar M. COPYRIGHT: (C)2011,JPO&INPIT
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