| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspection of an object to be inspected (hereinafter, a workpiece), capable of correctly and efficiently inspecting defects in the workpiece. SOLUTION: The inspection method of the workpiece of the invention includes: a workpiece image generation step of generating a workpiece image data based on a workpiece image obtained by a flaw search of the workpiece; an image extraction step of generating an extraction image data group including a plurality of extraction image data so as to extract a plurality of images having the same dimension from the workpiece image; an inspection image selection step of selecting one extraction image data from the extraction image data group, and considering it as an inspection image data; a reference image generation step of selecting two or more extraction image data among the extraction image data other than the extraction image data selected as the inspection image data from the extraction image data group, averaging two or more extraction image data, and generating a reference image data; and a defect detection step of comparing the inspection image data with the reference image data, and detecting the defect. COPYRIGHT: (C)2011,JPO&INPIT
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