| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a film-forming device capable of executing a process parameter of a data volume exceeding a finite memory volume, in the finite memory volume of a PLC, without degrading the throughput. <P>SOLUTION: A PLC system for controlling the film-forming device is constituted to include an operation computer for preparing a process recipe, and for storing the prepared process recipe; a next layer region P3, transferred sequentially with the process parameter processed in the next from the process recipe stored in the operation computer; a layer region P2 transferred sequentially with the process parameter stored in the next layer region P3; and a step execution area P1 read in sequentially with a command processed next, from among the process parameters stored in the layer region P2, and the commands stored in the step execution region P1 are sequentially executed a film is formed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
