| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size of a sensor node which operates on the electric power extracted out of vibration using a power generation element and detects own vibration with a vibrating element. SOLUTION: A power generation sensor element 11 includes a power generation electrode 11C of a thin metal plate which is formed on a substrate 11F; a charged body 11B arranged on the power generation electrode 11C; a support part 11H which is secured on the substrate 11F at the periphery of the power generation electrode 11C; an elastic spring 11G, whose one end is secured to the upper end of the support part 11H; a movable body 11A of thin metal plate which is connected to the other end of the spring 11G and is supported at the position facing the charged body 11B horizontally for vibration over the charged body 11B; and two sensor electrodes 11D and 11E of thin metal plate which are provided upright; at positions that face each other across the movable body 11A, at the periphery of the power generation electrode 11C on the substrate 11F. COPYRIGHT: (C)2011,JPO&INPIT |
