| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a package which can secure the continuity of the inside of the cavity and the outside, while maintaining airtightness inside a cavity, a piezoelectric vibrator, and to provide an oscillator, an electronic device and a radio wave clock. <P>SOLUTION: A filling process includes: a first filling process of scanning a fill squeegee comprising a rubber material whose rubber hardness is≥60 degrees and≤70 degrees along the outer surface 40a of a wafer 40 for a base substrate and filling glass frit 6a inside through-holes 30, 31; and a second filling process of scanning scribe squeegees 90, 91 comprising a resin material or a metal material along the outer surface 40a and filling the glass frit 6a inside the through-holes 30, 31. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
